MATERIAL COLLECTION METHOD AND MATERIAL COLLECTION APPARATUS

摘要

PROBLEM TO BE SOLVED: To prevent by-products produced as a result of machining from adhering to a workpiece or system optics and thereby from degrading quality of the workpiece and performance of the machine.SOLUTION: An apparatus for collecting material from a workpiece 106 being machined includes a fluid nozzle 200 for inducing a flow of a fluid, and a collection nozzle 202. The collection nozzle 202 includes a motive nozzle for accelerating a first portion of the fluid flow, and an induced-suction nozzle for receiving a second portion of the fluid flow. A suction force can be generated in the vicinity of the induced-suction nozzle one the basis of the accelerated first portion of the fluid flow. The suction force can be sufficient to carry at least a portion of the material away from the workpiece 106.