LASER DEVICE, AND LASER ANNEALING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a laser device which can be made at more low-cost.SOLUTION: An emission plane (a light emission plane) of an optical fiber 103 is arranged at a front focus position of a first optical system 210, and an incidence plane of a second optical system is arranged at a rear focus position of the first optical system 210. An interval between an incidence plane and an emission plane of the second optical system is equal to a focal length of the second optical system, and the emission plane of the second optical system is arranged at a front focus position of a third optical system. A top surface of a transparent substrate 2150 is positioned at a rear focus position of the third optical system 230. In this case, linear laser light which has large output and uniform light intensity can be emitted by a smaller number of optical systems than before.