发明名称 IMAGE ACQUISITION DEVICE, IMAGE ACQUISITION SYSTEM, AND MICROSCOPE DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an image acquisition device in which even when there is unevenness on a surface of a specimen in a depth direction thereof, excellent data of the whole specimen can be obtained with a simple configuration.SOLUTION: An image acquisition device 3000 includes: an image-forming optical system 40 for image-forming an object 30; a reimage-forming optical system 70 for reimage-forming the object 30 having been image-formed by the image-forming optical system 40; a reflection member 60 disposed on an optical path between the image-forming optical system 40 and the reimage-forming optical system 70; and an imaging element 80 for imaging the object 30 having been reimage-formed by the reimage-forming optical system 70 and outputting the image. The reflection member 60 has correction means capable of changing an inclination thereof with respect to an optical axis of the image-forming optical system 40 so as to correct position shift of the image in a rotational direction generated according to variation in the inclination of the reflection member 60.
申请公布号 JP2014029394(A) 申请公布日期 2014.02.13
申请号 JP20120169758 申请日期 2012.07.31
申请人 CANON INC 发明人 KATASHIBA YUJI;KAJIYAMA KAZUHIKO;FUJII HIROFUMI
分类号 G02B21/00 主分类号 G02B21/00
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