发明名称 |
IMAGE ACQUISITION DEVICE, IMAGE ACQUISITION SYSTEM, AND MICROSCOPE DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide an image acquisition device in which even when there is unevenness on a surface of a specimen in a depth direction thereof, excellent data of the whole specimen can be obtained with a simple configuration.SOLUTION: An image acquisition device 3000 includes: an image-forming optical system 40 for image-forming an object 30; a reimage-forming optical system 70 for reimage-forming the object 30 having been image-formed by the image-forming optical system 40; a reflection member 60 disposed on an optical path between the image-forming optical system 40 and the reimage-forming optical system 70; and an imaging element 80 for imaging the object 30 having been reimage-formed by the reimage-forming optical system 70 and outputting the image. The reflection member 60 has correction means capable of changing an inclination thereof with respect to an optical axis of the image-forming optical system 40 so as to correct position shift of the image in a rotational direction generated according to variation in the inclination of the reflection member 60. |
申请公布号 |
JP2014029394(A) |
申请公布日期 |
2014.02.13 |
申请号 |
JP20120169758 |
申请日期 |
2012.07.31 |
申请人 |
CANON INC |
发明人 |
KATASHIBA YUJI;KAJIYAMA KAZUHIKO;FUJII HIROFUMI |
分类号 |
G02B21/00 |
主分类号 |
G02B21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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