微影用防尘薄膜组件及其制造方法,申请号TW099112332-传众专利搜索

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发明名称	微影用防尘薄膜组件及其制造方法
摘要
申请公布号	TWI428690	申请公布日期	2014.03.01
申请号	TW099112332	申请日期	2010.04.20
申请人	信越化学工业股份有限公司日本	发明人	秋山昌次;久保田芳宏
分类号	G03F1/62;H01L21/027	主分类号	G03F1/62
代理机构		代理人	周良谋新竹市东大路1段118号10楼;周良吉新竹市东大路1段118号10楼
主权项
地址	日本

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