MANUFACTURING APPARATUS AND METHOD FOR ORGANIC EL ELEMENT AND MANUFACTURING APPARATUS AND METHOD FOR CVD THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing an organic EL element that can quickly optimize a manufacturing condition and a manufacturing step by measuring a band lineup in the middle of a manufacturing process such as each film forming step.SOLUTION: There are provided a wavelength-swept light irradiating unit for irradiating the surface of each layer of an organic EL element formed by film forming means with monochromatic light whose wavelength is swept within a predetermined wavelength region, a light amount measuring unit for measuring the light amount of at least one of reflection light and transmission light from a site of a measured layer irradiated with the wavelength-swept light, a collector electrode provided between the wavelength-swept light irradiating unit and the site of the measured layer, a current measuring unit (2) for measuring current which is caused by the irradiated light of the wavelength-swept light and flows between the measured layer and the collector electrode, and a film quality managing unit for calculating HOMO and LUMO of the measured layer from measurement results of the light amount measuring unit and the current measuring unit and managing the quality of the measured layer.