MICROMACHINED ULTRASONIC TRANSDUCER MODULE ARRAY

摘要

Disclosed is a micromachined ultrasonic transducer array. The disclosed micromachined ultrasonic transducer array includes an arrangement plate which is located on a printed circuit board, and a plurality of MUT modules which are arranged in a plurality of cavities on the arrangement plate and convex parts between adjacent cavities on the arrangement plate, respectively. The MUT module includes an ASIC arranged on the arrangement plate and an MUT arranged on the ASIC.