Actuator and optical scanning device using actuator

摘要

An actuator includes: a pair of supporting beams to support an object from both sides thereof in a direction parallel to an axis of rotation; a pair of movable beams to sandwich the object and the pair of supporting beams from both sides in a direction perpendicular to the axis of rotation; a plurality of beams to sandwich the pair of movable frames from both sides thereof in the direction perpendicular to the axis of rotation and support the object; a resonant drive source to apply bending vibration to the pair of movable frames and drive the object around the axis of rotation when a resonant drive operation is performed; and a non-resonant drive source to apply bending vibration to the plurality of beams and tilt and drive the object around a second axis of rotation perpendicular to the axis of rotation when a non-resonant drive operation is performed.