发明名称
摘要 PROBLEM TO BE SOLVED: To provide a wire saw device with a reduced breakage ratio of a wire. SOLUTION: The wire saw device S1 includes the wire 3 having abrasive grains fixed to its surface, a slicing board 2 for adhering a workpiece disposed on the wire 3, a base plate 10 for holding the slicing board 2, a device fixing unit 11 for fixing the base plate 10 and a supply nozzle 4 for supplying a working fluid to a part to be cut of the workpiece 1. It has a protruding part where part of the slicing board 2, the base plate 10 or the device fixing unit 11 is located outside an end of the workpiece 1 in a running direction of the wire 3. A distance d from an interface e between the workpiece 1 and the slicing board 2 to the protruding part is specified to be a distance free from splash of the working fluid. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP5460226(B2) 申请公布日期 2014.04.02
申请号 JP20090236164 申请日期 2009.10.13
申请人 发明人
分类号 B24B27/06;B24B55/02;B28D5/04;H01L21/304 主分类号 B24B27/06
代理机构 代理人
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