发明名称
摘要 Provided is a placement member including: a main body having a placement surface on which a sample is placed; and a plurality of heating units disposed within the main body. The plurality of heating units are individually temperature-controllable. The main body may have a non-placement surface on a side opposite of the placement surface, and the heating units may be disposed closer to the placement surface than to the non-placement surface.
申请公布号 JP5474215(B2) 申请公布日期 2014.04.16
申请号 JP20120544325 申请日期 2011.11.18
申请人 发明人
分类号 H01L21/027;H01L21/683 主分类号 H01L21/027
代理机构 代理人
主权项
地址