| 摘要 |
A mask cleaning device and a method thereof are provided to prevent damage and re-contamination of a mask by performing an indirect shower rinse. A mask cleaning device(100) comprises one or more cleaning bath(110), a rinse shower bath(120), a dryer(130), a transfer device(140), and one or more rinse dipping bath. The cleaning bath stores a cleaning solution(115). The rinse shower bath includes a rinse guide(122) and a rinse injector(124). The rinse injector sprays the rinse solution to the rinse guide. The dryer dries an object. The transfer device transfers a mask between the cleaning bath and the dryer, and between the rinse shower bath and the dryer. The rinse dipping bath is arranged between the cleaning bath and the rinse shower bath, and stores the rinse solution. |
