发明名称 DUAL PHASE CLEANING CHAMBERS AND ASSEMBLIES COMPRISING THE SAME
摘要 In one embodiment, a dual phase cleaning chamber may include a turbulent mixing chamber, a fluid diffuser, an isostatic pressure chamber and a rupture mitigating nozzle. The turbulent mixing chamber may be in fluid communication with a first fluid inlet and a second fluid inlet. The fluid diffuser may be in fluid communication with the turbulent mixing chamber. The rupture mitigating nozzle may include a first fluid collecting offset, a second fluid collecting offset, and a displacement damping projection. The displacement damping projection may be disposed between the first and second fluid collecting offset and may be offset away from each of the first fluid collecting offset and the second fluid collecting offset, and towards the fluid diffuser. A pressurized cleaning fluid introduced from the first fluid inlet, the second fluid inlet, or both flows through the outlet passage of the first and second fluid collecting offset.
申请公布号 KR20140046470(A) 申请公布日期 2014.04.18
申请号 KR20147004480 申请日期 2012.07.13
申请人 LAM RESEARCH CORPORATION 发明人 AVOYAN ARMEN;LA CROIX CLIFF;SHIH HONG
分类号 H05H1/34;C23C16/505;H01L21/3065 主分类号 H05H1/34
代理机构 代理人
主权项
地址