发明名称 FinFET Design with LDD Extensions
摘要 System and method for forming lightly doped drain (LDD) extensions. An embodiment comprises forming a gate electrode on a semiconductor fin and forming a dielectric layer over the gate electrode. The gate electrode is then etched to expose a portion of the semiconductor fin. The exposed portions of the fin comprise the LDD extensions.
申请公布号 KR101386684(B1) 申请公布日期 2014.04.18
申请号 KR20120058736 申请日期 2012.05.31
申请人 发明人
分类号 H01L21/336;H01L29/78 主分类号 H01L21/336
代理机构 代理人
主权项
地址