TDI SENSOR, IMAGE CAPTURING DEVICE, COMPONENT MOUNTING APPARATUS, COMPONENT TESTING APPARATUS, AND SUBSTRATE INSPECTION APPARATUS

摘要

A TDI sensor performs an operation of capturing a line image at predetermined timings and outputs, as an image of each image capture line, the line image exposed a plurality of times. The TDI sensor includes: a light receiving unit including pixel rows each having a plurality of image capturing elements arranged in a first direction and generating and holding electric charges corresponding to respective exposure amounts, and electric charge holding rows each having a plurality of electric charge holding sections having only a function of holding the electric charges and arranged in the first direction so as to correspond to respective image capturing elements of the pixel rows, one of the pixel rows and one or a plurality of the electric charge holding rows being alternately arranged in a second direction orthogonal to the first direction; and a transfer unit that sequentially, on a row-by-row basis, transfers electric charges held by the image capturing elements of the pixel rows and the electric charge holding sections of the electric charge holding rows to adjacent rows, and outputs, as a signal of the line image, a signal corresponding to electric charges finally accumulated by the transfer.