发明名称 PHOTORESISTS COMPRISING IONIC COMPOUND
摘要 Provided is a novel photoresist composition including radiation-non sensitive ionic compounds. The desirable photoresist of the present invention may include: a resin including a photoacid-unstable group; a photoacid generator compound; and a radiation-non sensitive ionic compound which can function to reduce the spread of photoacid from the non-exposure area of a photoresist coating layer.
申请公布号 KR20140056098(A) 申请公布日期 2014.05.09
申请号 KR20130130549 申请日期 2013.10.30
申请人 ROHM AND HAAS ELECTRONIC MATERIALS, L.L.C. 发明人 POHLERS GERHARD;LIU CONG;XU CHENG BAI;WU CHUNYI
分类号 G03F7/039;G03F7/038;G03F7/26;H01L21/027 主分类号 G03F7/039
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