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发明名称
正型感光性组合物及永久抗蚀剂
摘要
申请公布号
TWI437369
申请公布日期
2014.05.11
申请号
TW098135477
申请日期
2009.10.20
申请人
艾迪科股份有限公司 日本
发明人
斋藤诚一;森田博;竹之内宏美;小林纯;尾见仁一
分类号
G03F7/075;G03F7/039;G03F7/022;C08G77/14;C07F7/21;G02F1/1368;H01L51/50
主分类号
G03F7/075
代理机构
代理人
陈长文 台北市松山区敦化北路201号7楼
主权项
地址
日本
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