| 摘要 |
PROBLEM TO BE SOLVED: To provide a smaller, longer-life heating stage that increases the rate of temperature rise compared to conventional heating stages.SOLUTION: A heating stage 10 includes: a support plate 14; a top plate 16 that is made of quartz glass, that has a heating surface 16a for heating an object to be heated, and that is joined to the support plate 14; and a heater 18a that is made of metal and that is arranged, in contact with the top plate 16, between the support plate 14 and the top plate 16. The heating surface 16a of the top plate 16 blocks at least part of electromagnetic waves radiated by the heater 18a. The heating surface 16a of the top plate 16 is heated with both heat and electromagnetic waves from the heater 18a. |
