MANUFACTURING INSTALLATION OF METALHYDROXIDE, MANUFACTURING METHOD OF METALHYDROXIDE, AND SPUTTERING TARGET

摘要

PROBLEM TO BE SOLVED: To manufacture a metalhydroxide whose particle size is fine and uniform.SOLUTION: A metalhydroxide manufacturing installation which an anode 5 consisting of a metal of the metalhydroxide is arranged on the center and on the concentric circles of a columnar cathode 4 is used and the metalhydroxide is generated in electrolyte 3 by an electrolytic process.