| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring apparatus capable of efficiently measure the resistance of a substrate. SOLUTION: The measuring apparatus comprises: a switch 15Aa connecting a shield 203 of a cable 5a and a core wire 201 at the same potential when a probe 41a is connected with a voltage supply circuit 21 and a probe 41b is connected with a measurement part 13 in a primary connection mode in which the probe 41b is connected with a current detection circuit 22; a switch 15Ba connecting a shield 203 of a cable 5b and a core wire 201 at the same potential when a probe 41b is connected with the circuit 21 and the probe 41a is connected with the measurement part 13 in a secondary connection mode in which the probe 41a is connected with the circuit 22; a switch 15Bb connecting the shield 203 of the cable 5b to the ground potential when the probes 41a and 41b are connected with the measurement part 13 in the primary connection mode; and a switch 15Ab connecting the shield 203 of the cable 5a to the ground potential when the probes 41a and 41b are connected with the measurement part 13 in the secondary connection mode. COPYRIGHT: (C)2012,JPO&INPIT |
