发明名称 |
PRIMER, PRODUCTION METHOD OF PATTERNED CURED FILM, PATTERNED CURED FILM AND SEMICONDUCTOR ELEMENT |
摘要 |
PROBLEM TO BE SOLVED: To provide a primer with which a patterned cured film can be formed with good adhesiveness not only to a silicon substrate but to a wiring material such as copper and gold.SOLUTION: The primer is used for forming a photosensitive layer comprising a photosensitive resin composition which comprises an alkali-soluble resin including a phenolic hydroxyl group on a substrate; and the primer comprises a triazine compound having a mercapto group, and a solvent. |
申请公布号 |
JP2014102285(A) |
申请公布日期 |
2014.06.05 |
申请号 |
JP20120252434 |
申请日期 |
2012.11.16 |
申请人 |
HITACHI CHEMICAL CO LTD |
发明人 |
MATSUTANI HIROSHI;NOBE SHIGERU;KASUYA KEI;OKADA YUHEI;AOKI MASARU;KATOGI SHIGEKI;ABE KOICHI;TANIMOTO AKITOSHI;YAMAMOTO MASAHARU;TAHARA SHINGO |
分类号 |
G03F7/11;G03F7/004;G03F7/023 |
主分类号 |
G03F7/11 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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