| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an induction heating apparatus having an induction heating coil forming an AC magnetic flux parallel to the heated object mounting surface in a member to be inductively heated, in which power loss can be reduced while suppressing heat generation of the induction heating coil. <P>SOLUTION: An induction heating apparatus 10 includes: a susceptor 16 on which a wafer 60 is mounted; and induction heating coils 36, 38 which are arranged on the outer periphery of the susceptor 16 and form an AC magnetic flux parallel to the heated object mounting surface in the susceptor 16. The induction heating coils 36, 38 are constituted by a tube-shaped member capable of inserting a coolant therethrough in the vicinity of the susceptor 16, and the other winding portions are constituted by a non-tube-shaped member. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
