ABRASIVE PAD DRESSER AND PRODUCTION METHOD THEREOF, ABRASIVE PAD DRESSING DEVICE, AND POLISHING SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide an abrasive pad dresser which gives preferable polishing effect and fracture toughness resistance to polishing particles.SOLUTION: The abrasive pad dresser comprises: polishing particles 110 which are polyhedra and have a regulated shape respectively; and a base part body 120 having a polishing face S1. The polishing face S1 has certain roughness so that the polishing face S1 has unevenness, and the polishing particles 110 are fixed to the polishing face S1, at least parts of the polishing particles 110 are embedded to dents on the polishing face S1, and at least some of projections T of the polishing particles 110 in the dents face the opposite direction of the polishing face S1.