| 摘要 |
PROBLEM TO BE SOLVED: To decrease variation of end shapes of the glass substrates by decreasing polishing margins of the glass disks in the final polishing process, in a manufacturing method of crystallized glass substrates for magnetic disks including a polishing process for polishing main surfaces of the glass substrates by supplying polishing liquid containing at least one of cerium oxide and zirconia as polishing grains.SOLUTION: Main surfaces of glass substrates are polished by supplying the polishing liquids containing at least one of cerium oxide and zirconia as polishing grains between the main surfaces of amorphous glass substrates and polishing pads. After the first polishing process, the main surfaces of the glass substrates are cleaned by using cleaning liquids for removing the polishing grains used in the first polishing process. Then, the glass substrates are crystallized by heat treating the glass substrates. After the crystallization, the glass substrates are polished while supplying polishing liquids containing silica as polishing grains between the main surfaces of the glass substrates and polishing pads. |
