| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a surface shape measurement device that enables a focused slit image over an entire field of view to be obtained using an optical cutting method.SOLUTION: The surface shape measurement device comprises: irradiation means 14 that irradiates a surface of a measurement object 50 with slit light S; photographing means 15 that includes a lens and a light reception element, is disposed so that a direction of photographing axis is tilted by a prescribed angle with respect to an extension direction of the slit light S and photographs a slit image; pieces of movement means 11 and 12 that move the measurement object 50 relatively to the irradiation means 14 and the photographing means 15; and image process means 19 that detects a surface shape of the measurement object 50 from luminance data on the slit image. The light reception element is arranged so that a photographing plane of the light reception element on a side where a distance between the measurement object 50 and the lens is close is made close to the lens, and the photographing plane thereof on a side where the distance between the measurement object and the lens is distant is made far from the lens.</p> |
