| 摘要 |
PROBLEM TO BE SOLVED: To enable irregularities or physical properties to be measured accurately in a short time while taking care that the physical property to be measured is not affected by the irregularities when measuring a measurement sample surface having irregularities by using a scanning type probe microscope.SOLUTION: A controller 20 for a scanning type probe microscope is configured to include: a first control signal output unit 21A for outputting a first control signal for scanning one line on the surface of a measurement sample; a scanning speed setting unit 23 for setting, on the basis of information about irregularities on the measurement sample surface obtained by scanning of the one line corresponding to the first control signal, a scanning speed in a concave portion and a convex portion of the one line to be slower than a scanning speed in portions other than the concave and convex portions; and a second control signal output unit 21B for outputting a second control signal for scanning the one line on the basis of the set scanning speed for the one line. |
