| 摘要 |
PROBLEM TO BE SOLVED: To provide a seal unit, a transport device, and a semiconductor manufacturing apparatus capable of suppressing a situation in which an exhaust pump stops while abrasion of a contact seal develops.SOLUTION: A degradation warning system for a seal unit isolating two spaces at different pressures comprises: a housing; a movable member penetrating the housing, and arranged to have a gap with the housing; a contact seal hermetically closing the gap; a noncontact seal hermetically sealing the gap at a different position from the contact seal; an attraction groove that is a recess of a surface of the housing located between the contact seal and the noncontact seal; a discharge path connected to the attraction groove and discharging gas from the attraction groove; an attraction unit attracting the gas in the discharge path; and a control unit transmitting a signal in response to a change in a pressure in the discharge path. A position at which the noncontact seal is arranged is closer to the lower-pressure space out of the two spaces with respect to a position at which the contact seal is arranged. |
