发明名称 |
PHOTOSENSITIVE RESIN COMPOSITION, PRODUCTION METHOD OF CURED FILM, CURED FILM, LIQUID CRYSTAL DISPLAY DEVICE, AND ORGANIC ELECTROLUMINESCENCE (EL) DISPLAY DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a photosensitive resin composition that suppresses a bottom residue of a contact hole, suppresses surface roughening after development and shows excellent chemical resistance.SOLUTION: The photosensitive resin composition comprises: (A-1) (1) a polymer having a structural unit (a1-1) having a group in which an acid group is protected by an acid decomposable group and a structural unit (a1-2) having a crosslinking group; (B-1) a photoacid generator; and (C-1) a solvent. Otherwise, the photosensitive resin composition comprises: (A-2) a polymer having a structural unit (a2-1) having an acid group and a structural unit (a2-2) having a crosslinking group; (Q-2) a naphthoquinone compound; and (C-2) a solvent. In the above photosensitive resins, (S-1) a compound having a skeleton expressed by general formula (S) is compounded. |
申请公布号 |
JP2014235216(A) |
申请公布日期 |
2014.12.15 |
申请号 |
JP20130114971 |
申请日期 |
2013.05.31 |
申请人 |
FUJIFILM CORP |
发明人 |
YONEZAWA HIROYUKI |
分类号 |
G03F7/004;C08F12/22;C08F20/26;G02F1/1333;G03F7/023;G03F7/039;H01L21/027;H01L51/50;H05B33/10;H05B33/12;H05B33/22 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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