| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an illuminating device which allows for efficient adjustment of illumination of the illumination light, and to provide an exposure device, an illuminating method and a method of manufacturing a device.SOLUTION: An illuminating device includes a light transmission section including a plurality of optical fibers having emission ends arranged on a first surface, and emitting a lamp light beam from a lamp light source via the plurality of optical fibers from a light emitting section, a first optical system for guiding the lamp light beam emitted from a light transmission section to a second surface while collimating, a division section performing surface division of the lamp light beam passed through the first optical system on the second surface, and a laser light guide section for guiding a laser light beam emitted from a laser light source to the optical system. The laser light guide section includes a second optical system provided at a position in the light-emitting section where the first light emitted from the first surface is not blocked, and guiding a laser light beam to the first optical system while collimating.</p> |
