发明名称 対象装置のベースライン予知保全方法及びそのコンピュータプログラム製品
摘要 <p>A baseline predictive maintenance method for a target device (TD) and a computer program product thereof are provided. Fresh samples which are generated when the target device produces workpieces just after maintenance are collected, and a new workpiece sample which is generated when the target device produces a new workpiece is collected. A plurality of modeling samples are used to build a TD baseline model in accordance with a conjecturing algorithm, wherein the modeling samples include the new workpiece sample and the fresh samples. A TD healthy baseline value for the new workpiece is computed by the TD baseline model, and a device health index (DHI), a baseline error index (BEI) and baseline individual similarity indices (ISI B ) are computed, thereby achieving the goals of fault detection and classification (FDC) and predictive maintenance (PdM).</p>
申请公布号 JP5643387(B2) 申请公布日期 2014.12.17
申请号 JP20130125444 申请日期 2013.06.14
申请人 发明人
分类号 H01L21/02;G05B19/418;G05B23/02 主分类号 H01L21/02
代理机构 代理人
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