Dual scanning stage

摘要

A system having a beam for providing movement of a first stage and a second stage in a Y axis. The first stage receives a first substrate. A first motor provides movement for the first stage in an X axis. The second stage receives a second substrate. A second motor provides movement for the second stage in the X axis. The first stage and the second stage move together in the Y axis and independently in the X axis. A robot loads substrates onto the first stage and the second stage. A controller directs the robot to load a second substrate onto the second stage while simultaneously directing the first stage and the guide beam to scan a first substrate.

主权项

1. A stage system, comprising:
a guide beam for providing translational movement of a first stage and a second stage in a Y axis, the first stage for receiving a first substrate, the first stage slidably mounted to a first side of the guide beam, the first stage associated with a first motor for providing independent translational movement for the first stage in an X axis, the second stage for receiving a second substrate, the second stage slidably mounted to an opposing second side of the guide beam, the second stage associated with a second motor for providing independent translational movement for the second stage in the X axis, where the first stage and the second stage can only move together in the Y axis, as the guide beam moves in the Y axis, and move independently of and past one another in the X axis along opposing sides of the guide beam, a robot for loading and unloading substrates onto and off of the first stage and the second stage, and a controller for directing the robot to load a second substrate onto the second stage while simultaneously directing the first stage and the guide beam to scan a first substrate on the first stage in the X and Y axes.