| 摘要 |
PROBLEM TO BE SOLVED: To provide a pattern forming method in which contact holes having different diameter sizes can be formed by using a self-organization material.SOLUTION: According to an embodiment, a hydrophilic guide pattern 13 including a first hole forming pattern 131 with a first hole diameter and a second hole forming pattern 132 with a second hole diameter is formed on a processing target first. Then, a frame pattern 14 which has a first opening region 141 in a forming region of a plurality of first hole forming patterns 131 and a second opening region 142 in a forming region of a plurality of second hole forming patterns 132 is formed on a guide pattern. After that, first solution 21 containing first block copolymer having a hydrophilic polymer chain and a hydrophobic polymer chain is supplied to the first opening region 141 to coagulate the first block copolymer. Next, the hydrophilic polymer chain is removed to make the diameter of the first hole forming pattern 131a be a third hole diameter smaller than the first hole diameter. |
