| 摘要 |
PROBLEM TO BE SOLVED: To reduce noise by incident light passing through an etching hole in a high reflective mirror in which an optical multilayer film mirror is formed.SOLUTION: The high reflective mirror includes an optical multilayer film mirror formed in at least a part of the mirror. The optical multilayer film mirror includes: a first high refractive index film and a second high refractive index film having a first refractive index; and a first low refractive index layer having a second refractive index smaller than the first refractive index. The first high refractive index film and the second high refractive index film are disposed opposing to each other via the first low refractive index layer; and the first high refractive index film has a first through-hole that penetrates the first high refractive index film and communicates an outside space with the first low refractive index layer. A first light-shielding zone is formed on one surface side of the second high refractive index film opposite to the first high refractive index film; and the first light-shielding zone is selectively formed in such a manner that, in a part where the optical multilayer film mirror is formed, neither incident light in a direction along the stacked direction of the first and second high refractive index films and the first low refractive index layer, nor diffracted light of the incident light pass through the first through-hole. |
