SUCTION STRUCTURE, ROBOT HAND, AND ROBOT

摘要

PROBLEM TO BE SOLVED: To unfailingly suction a substrate where warpage occurs.SOLUTION: A suction structure according to one embodiment includes: a fixed base (a plate); a pad; a seal wall; a suction hole; and a thin wall part. The pad includes a contact part which contacts with a suctioned object and is supported by the fixed base. The seal wall is located at the contact part, and the contact part contacts with the suctioned object thereby causing the seal wall to form a vacuum chamber with a main surface part of the pad. The suction hole allows the vacuum chamber to communicate with a vacuum source. The thin wall part is formed on the main surface part of the pad that is enclosed by the seal wall.