| 摘要 |
<p>PROBLEM TO BE SOLVED: To unfailingly suction a substrate where warpage occurs.SOLUTION: A suction structure according to one embodiment includes: a fixed base (a plate); a pad; a support part; a twisting part; a seal member; and a suction hole. The pad includes a contact part which contacts with a suctioned object. The support part is disposed at a position on a straight line in the pad and fixes the pad to the fixed base. The twisting part is located at the support part and supports the pad so that the pad may tilt around the straight line. The seal member is provided between the pad and the fixed base. The suction hole allows a space enclosed by the contact part to pass through the seal member and communicate with a vacuum source.</p> |
