| 发明名称 |
THIN FILM DEPOSITION APPARATUS, DEPOSITION METHOD USING THE SAME, AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS BY USING THE APPARATUS |
| 摘要 |
A thin film deposition apparatus, a deposition method using the same, and a method of manufacturing an organic light-emitting display apparatus by using the apparatus are provided. A thin film deposition apparatus is provided that includes a chamber containing a substrate holder on which a substrate is mounted, a plurality of rotary shaft units that change rotation and an inclination angle of the substrate holder, and a target unit that supplies a thin film material for formation on the substrate. |
| 申请公布号 |
US2015031151(A1) |
申请公布日期 |
2015.01.29 |
| 申请号 |
US201414262088 |
申请日期 |
2014.04.25 |
| 申请人 |
SAMSUNG DISPLAY CO., LTD. |
发明人 |
LEE Ung-Soo;PARK Jin-Woo;CHOI Su-Hyuk |
| 分类号 |
C23C14/50;H01L51/56;C23C14/34 |
主分类号 |
C23C14/50 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A thin film deposition apparatus comprising a chamber containing:
a substrate holder on which a substrate is mounted; a plurality of rotary shaft units that change rotation and an inclination angle of the substrate holder; and a target unit that supplies a thin film material for formation on the substrate. |
| 地址 |
Yongin-City KR |
