发明名称 |
STRAIN DECOUPLED SENSOR |
摘要 |
A sensor comprises a substrate (16) and a sensor element (20) anchored to the substrate (16), the substrate (16) and sensor element (20) being of dissimilar materials and having different coefficients of thermal expansion, the sensor element (20) and substrate (16) each having a generally planar face arranged substantially parallel to one another, the sensor further comprising a spacer (26), the spacer (26) being located so as to space at least part of the sensor element (20) from at least part of the substrate (16), wherein the spacer (26) is of considerably smaller area than the area of the smaller of face of the substrate (16) and that of the sensor element (20). |
申请公布号 |
US2015028437(A1) |
申请公布日期 |
2015.01.29 |
申请号 |
US201314369874 |
申请日期 |
2013.01.04 |
申请人 |
Atlantic Inertial Systems Limited |
发明人 |
Fell Christopher Paul |
分类号 |
G01C19/5684;B81B3/00 |
主分类号 |
G01C19/5684 |
代理机构 |
|
代理人 |
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主权项 |
1. A sensor comprising a substrate and a sensor element anchored to the substrate, the substrate and sensor element being of dissimilar materials and having different coefficients of thermal expansion, the sensor element and substrate each having a generally planar face arranged substantially parallel to one another, the sensor further comprising a single spacer whereby the sensor element is anchored upon the substrate, the spacer being located so as to space at least part of the sensor element from at least part of the substrate, wherein the spacer is of considerably smaller area than the area of the smaller of the face of the substrate and that of the sensor element. |
地址 |
Devon GB |