| 摘要 |
The invention relates to a method and to an apparatus (1, 100, 101, 102) for the non-contact support of a sensor and/or actuator device (6) with respect to a substrate (2) which reflects sound at least in regions, in particular sheet metal, having a moving suspension means (4), having a sensor and/or actuator device (6) which is mechanically connected to the suspension means (4), and having a positioning device (5) which is mechanically connected to the suspension means (4) and which has at least one non-contact bearing for the non-contact support of the sensor and/or actuator device (6) with respect to the substrate (2). In order to ensure accurate positioning with respect to the substrate (2), it is proposed that the positioning device (5) has at least one sonotrode (7) for emitting an ultrasonic field which, between the sonotrode (7) and the substrate (2), forms acoustic levitation waves for the non-contact support of the sensor and/or actuator device (6) with respect to the substrate (2) by means of a non-contact bearing which is designed as an ultrasonic bearing (17). |
