SUPPORT MEMBER AND SUBSTRATE PROCESSING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a support member that achieves both thermal insulation of piping and space-saving.SOLUTION: The support member, capable of supporting one or a plurality of pipes that connect heat control means for controlling temperature of an arbitrary constituting element of a substrate processing apparatus and the substrate processing apparatus, includes a hollow part inside. The pipes are disposed in the hollow part.