ELECTROSTATIC CHUCK DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic chuck device in which a sign of dielectric breakdown can be detected during use or after use, and thereby dielectric breakdown can be predicted in advance.SOLUTION: An electrostatic chuck device 1 includes a dielectric plate 2 having an upper surface 2a serving as a mounting surface of a wafer W, and an electrode 3 for electrostatic attraction provided on the lower surface 2b of the dielectric plate 2. After a time when an electrode for measurement is formed or mounted on the upper surface 2a and a DC voltage is applied so that the current value between the electrode for measurement and the electrode 3 for electrostatic attraction becomes 1 nA/cm, to a time when the current flowing between the electrode for measurement and the electrode 3 for electrostatic attraction reaches 100 nA/cmwhile keeping this DC voltage is 1 sec or more.