| 摘要 |
PROBLEM TO BE SOLVED: To accurately inspect a metal mask sheet.SOLUTION: An inspection apparatus comprises: at least one tension section 13 for providing predetermined inspection tension that is set in advance, to a metal mask sheet 4 before being attached to a metal mask frame; and at least one of a size measurement section for measuring the size of the metal mask sheet, a distortion measurement section for measuring distortion of the metal mask sheet, and an appearance inspection section for inspecting a defect in the appearance of the metal mask sheet, with the tension section providing the tension to the metal mask sheet. |
