| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a flow rate sensor in which positioning accuracy of a sensor chip relative to a flow channel can be enhanced and the influence of heat of a circuit chip on the sensor chip can be reduced.SOLUTION: A sensor assembly 21 has a lead frame 25 on which a circuit chip 23 is mounted, a body 26 partially sealing the circuit chip 23 and the lead frame 25, and a projecting part 27 to which a sensor chip 22 is fixed and which projects from the body 26. The lead frame 25 has an exposure part 40 where a part of the lead frame 25 is exposed from a tip part 39 of the projecting part 27. The exposure part 40 is fixed by being inserted into a groove part 17 formed in an opposing part 16 which, out of a flow channel 11 of a flow channel part 10, opposes the projecting part 27. In this way, not only the position of the projecting part 27 is fixed but also heat of the sensor assembly 21 is transmitted to the opposing part 16.</p> |
