PHYSICAL QUANTITY SENSOR, ELECTRONIC APPARATUS, AND MOVABLE BODY

摘要

PROBLEM TO BE SOLVED: To provide a physical quantity sensor capable of being prevented from being damaged by displacements in horizontal and rotational axis directions of a movable body that is pivotally supported.SOLUTION: A physical quantity sensor comprises: a detection electrode part 21 as a fixed electrode part; a movable body 50 that makes its main surface face the detection electrode part 21 above and is supported by a support part 42; and a stopper part 70 that is provided to face at least a portion of an outer edge of the movable body 50 and that regulates an in-plane rotational displacement of the main surface of the movable body 50.