| 摘要 |
<p>[Problem] To provide a high-resolution optical interference sensor which, not having component-connecting joints, is easily processed with MEMS technology and can be formed as a single body, is capable of continuous measurement even in high-temperature environments, and can measure physical quantities with a high dynamic range and a high sampling frequency; and to provide a measurement system using said sensor. [Solution] An oscillator supported by a spring member in the vibration direction is provided inside of the sensor main body. A displacement surface is arranged on the front surface of the oscillator in the oscillation direction, and a reference surface is arranged coaxially with the displacement surface on the rear surface of the oscillator. The sensor is further provided with a first optical path system which irradiates the reference surface with light and receives light reflected from the reference surface, a second optical path system which irradiates the displacement surface with light and receives light reflected from the displacement surface, and a delay unit which is inserted between the first optical path system and the second optical path system. By multiplexing the light received in the first optical path system and the second optical path system, it becomes possible to measure the optical path difference of the reference surface and the displacement surface.</p> |
