| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of examining a sample.SOLUTION: In the method of examining a sample by using a charged-particle microscope and a Raman spectroscope in combination, the microscope irradiates a sample with a beam of charged particles to image a region of the sample, and the spectroscope uses a light spot having a width D to radiatively stimulate and spectroscopically analyze a portion of the sample. The method comprises a step of using the charged-particle microscope to identify a feature of interest in the region and a step of choosing the portion that is analyzed by the Raman spectroscope so that the portion includes this feature. The feature has at least one lateral dimension smaller than D. Prior to analysis of the feature using the Raman spectroscope, an in situ surface modification technique is used to cause positive discrimination of an expected Raman signal from the feature relative to an expected Raman signal from the portion other than the feature. |
