发明名称 MASK FRAME ASSEMBLY FOR THIN FILM DEPOSITION
摘要 A mask frame assembly for depositing a deposition material on a deposition substrate comprises a mask frame including an opening and frames surrounding the opening, and a mask coupled on the mask frame. A deformation prevention unit is formed on at least one region of the mask. Since the deformation prevention unit is formed on a peripheral portion of a deposition pattern in the mask, deformation of the mask in a vertical direction may be reduced. Accordingly, defective attaching of the mask to the substrate may be reduced.
申请公布号 US2015027367(A1) 申请公布日期 2015.01.29
申请号 US201414508832 申请日期 2014.10.07
申请人 Samsung Display Co., Ltd. 发明人 Hong Jeremy
分类号 B05C21/00;H01L51/56;C23C14/04 主分类号 B05C21/00
代理机构 代理人
主权项
地址 Yongin-City KR