发明名称 OPTICAL SEMICONDUCTOR ELEMENT AND MANUFACTURING APPARATUS OF THE SAME
摘要 PROBLEM TO BE SOLVED: To provide an optical semiconductor element having a larger optical gain and good optical characteristics with size equivalent with that of a conventional optical device.SOLUTION: An optical semiconductor element 20 comprises: a semiconductor substrate 21; a plurality of nanowire cores 25 which grow on the semiconductor substrate 21 an each of which includes a distortion semiconductor layer; and a semiconductor crystal layer 29 which forms one columnar structure 31 obtained by filling gaps among the plurality of nanowire cores 25 and which has the same crystal structure and the same plane direction with respect to an in-plane direction with those of the nanowire core 25. An optical distance between the neighboring nanowire cores 25 is smaller than an operating wavelength.
申请公布号 JP2015018923(A) 申请公布日期 2015.01.29
申请号 JP20130144909 申请日期 2013.07.10
申请人 FUJITSU LTD 发明人 KAWAGUCHI KENICHI
分类号 H01L33/06;H01L33/08;H01S5/34 主分类号 H01L33/06
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