METHOD FOR MANUFACTURING SUBSTRATE FOR ELECTROOPTICAL DEVICE, SUBSTRATE FOR ELECTROOPTICAL DEVICE, ELECTROOPTICAL DEVICE, AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a substrate for an electrooptical device capable of stably forming a groove having a shape suitable for a prism as a light reflection unit.SOLUTION: A method for manufacturing a substrate for an electrooptical device comprises the steps of: forming a mask on a first surface of the substrate (step S1); forming an opening surrounded by a wall surface and including a first width on the mask (step S2); forming a first groove by anisotropically etching the first surface exposed in the opening (steps S3 and S4); removing the mask (step S5); and forming a second groove whose opening has a second width by accumulating a first insulating film covering the inside of the first groove (step S6). The first width is wider than the second width.