| 摘要 |
The invention relates to a device for inspecting workpiece surfaces, having the following features: a sensor (7) which is designed to inspect a workpiece surface, a sonotrode (8a, 8b) which has a sound-radiating surface and is rigidly connected to the sensor (7) in order to form a sensor unit (5), and a movable positioning device (6), which is coupled to the sensor unit (5), for positioning the sensor unit (5) opposite the workpiece surface. The positioning device (6) has pressing means which press the sensor unit (5) in the direction of the workpiece surface, and the sound-radiating surface of the sonotrode (8a, 8b) vibrates ultrasonically such that an ultrasonic levitation force field is produced in the presence of a gaseous medium between the workpiece surface and the sound-radiating surface. The force field generates a counterforce directed against the pressing force, whereby the sensor unit (5) is kept at a distance to the workpiece surface in a hovering manner, and the sensor is designed to detect different physical effects, such as surface-structure deviations or color deviations for example. |
