发明名称 A SOC DESIGN WITH CRITICAL TECHNOLOGY PITCH ALIGNMENT
摘要 An SOC apparatus includes a plurality of gate interconnects with a minimum pitch g, a plurality of metal interconnects with a minimum pitch m, and a plurality of vias interconnecting the gate interconnects and the metal interconnects. The vias have a minimum pitch v. The values m, g, and v are such that g 2+m 2=v 2 and an LCM of g and m is less than 20g. The SOC apparatus may further include a second plurality of metal interconnects with a minimum pitch of m2, where m2 > m and the LCM of g, m, and m 2 is less than 20g.
申请公布号 CA2917642(A1) 申请公布日期 2015.01.29
申请号 CA20142917642 申请日期 2014.07.23
申请人 QUALCOMM INCORPORATED 发明人 CHEN, XIANGDONG;KWON, OHSANG;TERZIOGLU, ESIN;BUNNALIM, HADI
分类号 H01L27/02;H01L21/768;H01L23/498;H01L23/522 主分类号 H01L27/02
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