PHOTO DEVICE INSPECTION APPARATUS AND PHOTO DEVICE INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a technique capable of measuring a current and an electromagnetic wave generated in a photo device in response to light irradiation at low cost.SOLUTION: A photo device inspection apparatus 100 is an apparatus for inspecting a solar battery panel 90 that is a photo device. The photo device inspection apparatus 100 includes: an irradiation unit 12 irradiating a solar battery panel 90 with a pulsed light LP 11 emitted from a femtosecond laser 121 that is a light source; an electromagnetic wave detector 132 detecting an electromagnetic pulse LT1 radiated from the solar battery panel 90; and an ammeter 14 detecting a current generated in the solar battery panel 90 in response to irradiation of the pulsed light LP11.