| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of fabricating vapor cells in which pressure in anodically bonded vapor cells is uniform.SOLUTION: The method of fabricating the vapor cells comprises: a step of forming a plurality of vapor cell dies 302 in a first wafer having an interior surface region 306 and a perimeter 308; a step of forming a plurality of interconnected vent channels 304 in the first wafer, the ventilation channel 304 providing at least one pathway for gas from each vapor cell die 302 to travel to the outside of the perimeter 308 of the first wafer: a step of anodically bonding a second wafer to one side portion of the first wafer; and a step of anodically bonding a third wafer to a side portion on the opposite side, of the first wafer. The vent channels 304 enables gas flowing toward the interior surface region of the first wafer to be in substantially continuous pressure-equilibrium with gas outside the perimeter 308 of the first wafer during the anodic bonding of the second and third wafers to the first wafer,. |
